Matching network(MN) efficiently supply devices with RF. Matching network
MN matches impedance between an RF generator and a plasma device. This process prevents the reflection from a plasma device. MN parts (air variable capacitors, geared motors etc.) have problems.
P.R.A. removes problems of MN, and makes DC motors more sensitive. As a result,
reproducibility of experiment process improves more than before.
・Improve the specs of parts.
・Improve the repeatability of etching.
・Extend life span.