RF-Matching network

RF-Matching network

Matching network

Matching network(MN) efficiently supply devices with RF.  Matching network

MN matches impedance between an RF generator and a plasma device. This process prevents the reflection from a plasma device. MN parts (air variable capacitors, geared motors etc.) have problems.
P.R.A. removes problems of MN, and makes DC motors more sensitive. As a result,
reproducibility of experiment process improves more than before.

 

              Advantage

     ・Improve the specs of parts.

     ・Improve the repeatability of etching.

     ・Extend life span.

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