Matching network

Matching network

Repair

  • AZX series (manufactured by AE)

  • Dome matcher (manufactured by AE)

  • ラムリサーチ社製ボトムマッチャー

    Bottom matcher (manufactured by Lam Research)

  • AMAT社製DPSマッチャー

    DPS series (manufactured by AMAT)

  • HE matcher (manufactured by AMAT)

Upgrade

We improve reliability by re-engineering.

HE Plus

HE matcher upgrade

We upgrade the main parts and control board to improve matching speed and reliability.

P5000 Plus

P5000 matcher upgrade

P5000マッチャーアップグレード

We upgrade the main parts specifications and prolong the life span.

MDX-L Plus

DC generator MDX series upgrade

DC電源MDX-Lアップグレード

We increase the heat dissipation to improve the reliability and prolong the life span.

ESC power supply for TCP  PLUS

TCP用ESCアップグレード

We upgrade the circuit components, mount the rush current preventing circuit.

Please feel free to contact us if you have any problems with plasma.

  • +81-47-369-3389
  • Contact by FAX:+81-47-369-3317
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