Remote plasma source

Remote plasma source


      • RPS series 2L, 3L, 6L (manufactured by MKS)

        We can offer you a long service life by improving the plasma block. Please contact us for details.

      • RPS series 22L(manufactured by MKS)

  • Rapid series (manufactured by AE)  

  • XSTREAM series (manufactured by AE)

Please feel free to contact us if you have any problems with plasma.

  • +81-47-369-3389
  • Contact by FAX:+81-47-369-3317
  • Contact Form