RF generator

RF generator

RF generator

  • AE社製RFGシリーズ

    RFG series (manufactured by AE)


    Remote plasma source (manufactured by AE, MKS)

  • RFPP series (manufactured by AE)

  • COMDEL社製CX、CDXシリーズ

    CDX series (manufactured by COMDEL)

  • COMDEL社製CPSシリーズ

    CPS series (manufactured by COMDEL)

  • MKS(ENI)社製RF電源

    RF generator (manufactured by MKS)


    RF generator (manufactured by SPECTRUM)

  • AMAT装置用SSD Board

    SSD Board for AMAT devices

Please feel free to contact us if you have any problems with plasma.

  • +81-47-369-3389
  • Contact by FAX:+81-47-369-3317
  • Contact Form