ESC power supply
ESC（Electrostatic Chuck; ESC) power supply
ESC power supplies is DC generators. They fix Si wafers to ceramics plates. By applying an DC voltage, an electrostatic attraction is formed between wafer and plate.
Si wafer etching process is used in microfabrication such as electronic circuits. Etching requires a vacuum environment, so we must fix wafers without vacuum chuck. Under vacuum, the method of fixing wafers is Electrostatic chuck(ESC) only. ESC is chucking system using static electricity. ESC is used in PVD, CVD process chamber.
As shown on the right figure, polarity reverses between electrode plate, ceramics plate and wafer. With that, when wafers close with a ceramics plate, ESC is occur.
Adsorption forces are set by the charge amount. In order to supply electric charge, ESC power supply is necessary.
・High Voltage polarity inversion.
・Compatible with COMDEL’s and Spellman’s.
・Protect from surge current and arc current.
・Short/Open protective circuit raise reliability.